Products
- Product Description
- Technical Parameters
- Technical Advantage
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Microwave plasma cleaning machine is suitable for micro-cleaning, surface activation, modification, deoxidation, etching, descum and other applications of materials surface, especially for the non-damage cleaning with chips of microelectronic package applications before die bonding, and underfill, etc.
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Drag and drop the drop-down bar on the right to view more parameters
Specification
HC-PL12
HC-PL70
External size
W880mm*H620mm*D720mm
W860mm*H1900mm*D1050mm
Internal size of chamber
W225mm*H225mm*D225mm
W425mm*H365mm*D465mm
Microwave power
2.45GHz,100W-500W adjustable
2.45GHz,100W-1000W adjustable
Gas inlet
Standard 2 channels, including MFC and magnetic valve
Standard 2 channels, including MFC and magnetic valve
Vacuum interface
DN16KF
DN40KF
Power supply
380V，50/60Hz 3.3KW including vacuum pump
380V，50/60Hz 4.3KW including vacuum pump
Control unit
Touch screen PLC control
Touch screen PLC control
Vacuum gauge
Pirani vacuum gauge
Pirani vacuum gauge or capacitiance manometer
Main application
Organic contaminant removal, surface activization, oxide reduction,
PR descum, and surface polymerization coating, etc.
Organic contaminant removal, surface activization, oxide reduction,
PR descum, and surface polymerization coating, etc.
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Plasma cleaning with no damage.
Easy-to-use graphical interface.
Make small holes and slits clear.
No electrode sputtering contamination.
Low cleaning temperature.
Related Products
Message consultation
Contact Us
Yantai Headquarters: No.39 Xiamen Street, Yantai Area, China (Shandong) Free Trade Zone
North China Sales and Service Center: High-tech Industrial Development Zone, Zhuozhou City, Baoding City, Hebei Province, and Valley Science and Technology Industrial Institute
Northwest R & D, Sales and Service Center: Zhongxing Shenlan Science and Technology Industrial Park, Science and Technology Planning Resource Demonstration Zone, Fengdong New City, Xixian New District, Xi 'an, Shaanxi Province
Southwest Sales and Service Center: Information Optoelectronic Industry Base, 188 Guangyao 3rd Road, Qingyang District, Chengdu City, Sichuan Province
South China Sales and Service Center: Honghualing Craftsmanship Industrial Park, Taoyuan Street, Nanshan District, Shenzhen City
Contact Phone: 0086 535 6388095 / 0086 535 3021333 / +8613255522639
Mailbox: nancyzhang@pcm-bj.com
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