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HC-VS330G Type Getter Activation High Vacuum Reflow Oven System

Classification:

Getter Activation Vacuum Reflow Ove

Key words:

  • Product Description
  • Technical Parameters
  • Technical Advantage
  • HC-VS330G is a high vacuum system specially designed for vacuum packaging, which is launched by Yantai Huachuang based on many years of experience in the design, manufacture, process and service of vacuum reflow oven equipment. HC-VS330G can meet the sealing and welding requirements of MEMS devices such as gyroscopes, acceleration sensors and infrared sensors under high vacuum conditions, while achieving thermal and electrical activation of getter under high vacuum environment. The system can be used for scientific research and mass production of devices.

  • Drag and drop the dropdown bar on the right to view more parameters

    Model

    HC-VS330G

    Max. temperature

    500℃(Higher temperature optional)

    Temperature control precision

    ±0.5℃

    Area of heating plate

    330mm*320mm

    Temperature uniformity

    ±1-1.5%(Valid working area)

    Ultimate vacuum

    5*10-6mbar(Higher vacuum optional)

    Max. heating rate

    200℃/min(Without load)

    Max. cooling rate

    150℃/min(Without load,water cooling+air cooling)

    Chamber height

    100mm

    Top heating

    Standard configuration,independent temperature control

    Water cooling

    Standard configuration

    MES interface

    Standard configuration

    Barcode scanner

    Optional

  • 1、The equipment is based on the company's stable and reliable VS330H equipment which has been verified by the market.

    2、The top and the bottom are respectively heated by multiple groups of infrared lamps, which can be independently controlled to improve the temperature uniformity of Getter activation and cap welding.

    3、The self-designed water-cooling system can improve the cooling efficiency and welding quality under vacuum.

    4、The equipment has the function of controllable cooling rate to improve welding stress.

    5、The equipment has multi-stage pressure control ability, which can stably maintain a variety of vacuum values for a long time to meet a variety of process requirements.

    6、The self-designed water-cooling shutter can ensure that the high temperature radiation heat will not damage the bases and the internal devices of the bases when the getter is activated.

    7、The company has a number of senior technical personnel engaged in packaging process with rich experience in fixture design, and they can assist customers to complete fixture design and production.

    8、The core components of the equipment are all internationally renowned brands, so as to ensure the long-term stability and reliability of the equipment.

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