Products
HC-VS330G Type Getter Activation High Vacuum Reflow Oven System
Classification:
Getter Activation Vacuum Reflow Ove
Key words:
- Product Description
- Technical Parameters
- Technical Advantage
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HC-VS330G is a high vacuum system specially designed for vacuum packaging, which is launched by Yantai Huachuang based on many years of experience in the design, manufacture, process and service of vacuum reflow oven equipment. HC-VS330G can meet the sealing and welding requirements of MEMS devices such as gyroscopes, acceleration sensors and infrared sensors under high vacuum conditions, while achieving thermal and electrical activation of getter under high vacuum environment. The system can be used for scientific research and mass production of devices.
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Model
HC-VS330G
Max. temperature
500℃(Higher temperature optional)
Temperature control precision
±0.5℃
Area of heating plate
330mm*320mm
Temperature uniformity
±1-1.5%(Valid working area)
Ultimate vacuum
5*10-6mbar(Higher vacuum optional)
Max. heating rate
200℃/min(Without load)
Max. cooling rate
150℃/min(Without load,water cooling+air cooling)
Chamber height
100mm
Top heating
Standard configuration,independent temperature control
Water cooling
Standard configuration
MES interface
Standard configuration
Barcode scanner
Optional
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1、The equipment is based on the company's stable and reliable VS330H equipment which has been verified by the market.
2、The top and the bottom are respectively heated by multiple groups of infrared lamps, which can be independently controlled to improve the temperature uniformity of Getter activation and cap welding.
3、The self-designed water-cooling system can improve the cooling efficiency and welding quality under vacuum.
4、The equipment has the function of controllable cooling rate to improve welding stress.
5、The equipment has multi-stage pressure control ability, which can stably maintain a variety of vacuum values for a long time to meet a variety of process requirements.
6、The self-designed water-cooling shutter can ensure that the high temperature radiation heat will not damage the bases and the internal devices of the bases when the getter is activated.
7、The company has a number of senior technical personnel engaged in packaging process with rich experience in fixture design, and they can assist customers to complete fixture design and production.
8、The core components of the equipment are all internationally renowned brands, so as to ensure the long-term stability and reliability of the equipment.
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