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Multilayer Vacuum Reflow Oven

equipment which provides a good process environment for alloy welding of electronic devices by using the principle of vacuum heating, auxiliary formic acid and other technological means. The equipment is widely used in IGBT,high-power LED, high-power semiconductor laser,optical communication semiconductor laser, Lidar devices,TR components, hybrid circuits, discrete devices, MEMS devices, infrared devices and other high-end device packaging.It can realize the perfect welding of high reliability,high vacuum and low cavity of this kind of device.

Classification:

Multi-layer Vacuum Reflow Oven

Key words:

  • Product Description
  • Technical Parameters
  • Technical Advantage
  • equipment which provides a good process environment for alloy welding of electronic devices by using the principle of vacuum heating, auxiliary formic acid and other technological means. The equipment is widely used in IGBT,high-power LED, high-power semiconductor laser,optical communication semiconductor laser, Lidar devices,TR components, hybrid circuits, discrete devices, MEMS devices, infrared devices and other high-end device packaging.It can realize the perfect welding of high reliability,high vacuum and low cavity of this kind of device.

     

  • Drag and drop the dropdown bar on the right to view more parameters

    Technical parameters/ Model

    HC-MPVS500

    Max. temperature

    450℃

    Temperature control precision

    ±1℃

    Area of heating plate

    520mm*500mm

    Layer quantity of heating plate

    3

    Spacing between heating plate

    150mm(Net height)

    Temperature uniformity

    ±3℃(85% valid area)

    Ultimate vacuum

    2*10-2mbar(5*10-5mbar optional)

    Process gas path

    2路(N2、formic acid)

    Max. heating rate

    50℃/min

    Max. cooling rate

    100℃/min

    Cooling method

    Water cooling+Air cooling

    Single layer bearing

    25kg

    Solder paste technology

    Support

    Dimension

    1160mm*1450mm*2300mm

    Weight

    About 1000kg

  • 1、Software system: The interface of software is simple and intuitive. The data and process curve can be freely controlled.

    2、The capability of temperature control: The equipment uses Germany Siemens industrial control system and Siemens temperature measure-ment module for accurate closed-loop control.

    3、Temperature control method: Independent intellectual property rights. PID adjusts the AEG power regulator automatically for precise  temperature control.

    4、Temperature measurement method: There is 1 thermocouple for main control, 1 thermocouple for overtemperature protection, and 2 movable thermocouples

    5、Cooling method: Air cooling/ water cooling. Water cooling can be used in vacuum sealing process. 

    6、Safety function: Overtemperature protection function, water flow and air pressure monitoring function, and formic acid pipeline pressure control.

    7、MES function: With open OPC/ UA protocol, users can simply interconnect with MES system.

    8、Process gas path: There are 2 MFC for precise control. The nitrogen flow rate is 50SLM, and the formic acid flow rate is 30SLM.

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